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In this study, a gas‐sensitive scanning photo‐induced impedance microscopy (SPIM) sensor using tin dioxide (SnO2) as sensing element is proposed, which detects the local impedance change on the sensor surface in response to ethanol vapor. The impedance change of the SnO2 film is detected by monitoring the AC photocurrent signal induced by a laser beam. This measurement can be done in a spatially...
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