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We deposit Fe 50 Pd x Pt 50−x alloy thin films by magnetron sputtering onto a TiN seed layer. Chemically ordered L1 0 films are obtained which display large perpendicular magnetic anisotropy. We find that the surface roughness of the film depends strongly on the growth and anneal conditions as well as the Pd composition of the film. Smooth films are obtained by deposition...
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