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We report on the growth of high Mg content, high quality, wurtzite MgxZn1−xO (MgZnO) epitaxial films using a pulsed metal organic chemical vapor deposition (PMOCVD) method. Series of MgZnO films with variable Mg concentration were deposited on bare and AlN coated sapphire substrates. The band gap of the films estimated using UV–visible transmission spectra ranges from 3.24eV to 4.49eV, corresponding...
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