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Most of simulation activities implemented on semiconductor manufacturing are focus on the device characteristics, and electrical properties. Less investigation pays attention on micro-structure stress/strain calculation with finite element analysis. This investigation demonstrates the ANSYS simulation results match with real cases results. The chip-level micro-structure simulations include the metal...
In this paper, we firstly discussed the principle and deformation characteristic of axial-pushed incremental rolling process of spline shaft, and then, an axial-pushed incremental warm rolling process of spline shaft with 42CrMo steel is introduced and studied to investigate the formation mechanism and analyze the effects of process parameters. In order to improve the accuracy of finite element simulation,...
In this paper, a dual ring ultrasonic motor based on out of plane bending vibration mode is proposed, fabricated and characterized. This motor is composed of a stator constituted with two ring and one rod-shaped transducer at the middle and two disk shaped rotors. There are four piezoelectric ceramic plates are bolted at the middle of the rod-shaped transducer and used to excite the stator's blending...
A novel micro ultrasonic motor for multi-channel actuator control is proposed. It is composed of a stator constituted with a ring and two rod-shaped transducers and two cone shaped rotors. Two rod-shaped transducers have rectangular cross section, where four sets of piezoelectric element are bolted. Two sets excite longitudinal vibrations of the bars, and the other sets excite flexural vibrations...
In this paper, a three-level model of micro bolometer was established by intellisuit software. The total heat capacity, resistance and device thermal conductance Gdev (lower limit) was obtained by theoretical calculation, resistance extraction and dynamic thermal finite element simulation respectively. According to the relationship among of the bias current, effective thermal conductance and device...
The study focus on the process of metal electroplating on copper substrate to assemble LED chips and molding PET-copper foil to implement a flexible module with LED chips. The process can be divided into two parts,-assembling process and molding process. The LEDs are integrated on copper foil which can deal with the heat dissipation problem effectively. The metal electroplating on copper circuitry...
The study focus on the process of metal electroplating on copper substrate to assemble LED chips and molding PET-copper foil to implement a flexible module with LED chips. The process can be divided into two parts,-assembling process and molding process. The LEDs are integrated on copper foil which can deal with the heat dissipation problem effectively. The metal electroplating on copper circuitry...
The essay gives design ideas of the circlip switch and builds three-dimensional model. Based on finite element analysis software(ANSYS), stress of the gravity block and reed used as switch poles is analyzed. assessing and analyzing force and deformation of the reed by ANSYS analysis results. Hammer test is carried out to simulate ultrahigh overload environment of the processed switch. Test result...
The essay analyses overload characteristics of traveling wave type rotary ultrasonic motor. Establishing finite element model of the Traveling Wave Type Rotary Ultrasonic Motor under impact load and using finite element software (LS-DYNA) to simulate impact process of ultrasonic motor in a large overload system. Researching bearing overload capacity according to the current structure of ultrasonic...
Yield impacting systematic defects finding is no longer just relied on Design Rule Checking (DRC) provided by designer or Lithography Rule Checking (LRC) provided by post-optical proximity correction (OPC) results. An inspection flow is proposed in this paper, which is combining the inspection KLA tool and Hotspot Pattern Analyzer (HPA) database software to do the systematic defects filtering, sorting,...
Uncooled infrared detectors are applied widely in both civilian and military. Recently, novel microbolometers composing of two planes located at different levels were proposed to improve the performance of the detectors. In this paper, such two-layer microbolometers were simulated by finite element analysis. Results reveal that when SiO2 film is utilized as the isolating and supporting material located...
The near-field acoustic levitation (NFAL) relative to other suspension methods has some unique advantages, such as no special requirements on the electromagnetic properties of the object, with considerable levitation and driving force, and so on. A novel ultrasonic levitation of gyroscope has been developed based on the inverse piezoelectric effect. The ultrasonic vibration is induced by two B04 flexural...
This paper presents a dynamic analysis of a piezoelectrically driven vibro-impact drilling device with low down force and power consumption. The drilling device consists of an ultrasonic transducer with a piezoelectric stack, a free flying mass and a drill stem. Excited by the high-frequency vibration of the transducer the free mass oscillates between the horn tip of the transducer and the drill stem...
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