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In this paper, a silicon cavity-mode resonator based on locally resonant phononic crystal (PnC) is experimentally studied. The PnC resonator is realized by creating line defects on a two-dimension (2-D) silicon PnC. The silicon resonator was fabricated by micro machining process, and tested by a combination of the fluid coupling method and Laser Doppler Vibrometer. Two resonant frequencies (7.93MHz...
An approach to the modeling and simulating the air damping effect on quality factor (Q) of a square plate Lamé mode microresonator is presented in this paper. Both the squeeze film damping and slide film damping are considered in the analysis procedure. The Reynolds equation and the Stoke-flow model are used to investigate the reactions of the resonant plate with the air flows in the transduction...
This letter presents a hybrid silicon etching-based technique for single crystal silicon micromechanical resonators fabrication. The proposed method differs from previous works by combining a front-side wet anisotropic pre-etching and a front-side DRIE dry anisotropic post-etching in micromachining micromechanical resonators. The wet etching is used to pre-etch a cavity for structure release in the...
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