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In article number 1901944, Itai Cohen, and Paul L. McEuen, and co‐workers describe micromechanical structures, metamaterials, and actuators fabricated from nanometer‐thick films produced by atomic‐layer deposition (ALD) on sacrificial layers. Devices fabricated in this way are extraordinarily sensitive to small forces and torques because they exhibit ultralow bending stiffness. The microfabrication...
Bending and folding techniques such as origami and kirigami enable the scale‐invariant design of 3D structures, metamaterials, and robots from 2D starting materials. These design principles are especially valuable for small systems because most micro‐ and nanofabrication involves lithographic patterning of planar materials. Ultrathin films of inorganic materials serve as an ideal substrate for the...
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