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In this paper, the development of a quadruped micro-electro mechanical system (MEMS) microrobot with a four-leg independent mechanism is described. As the actuator mechanism inside small robot bodies is difficult to realize, many microrobots use external field forces such as magnetism and vibration. In this paper, artificial muscle wires that are family of shape memory alloy are used for the force...
The hexapod legs of insects achieve stable walking motions on various surfaces. This paper proposes a walking hexapod microrobot that mimics an insect's walking behavior. Miniaturization of the robot is an important issue. The miniaturized robotic component is fabricated by the micro electro mechanical systems (MEMS) process, which is based on the IC production process using silicon wafer as the starting...
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