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In this paper, the amplitude and frequency stability of a mode-localized sensor are characterized in a closed loop setup. The system describes an absolute amplitude ratio sensitivity of 5250 to stiffness perturbations in linear operation. A stability of 432ppm at 500s integration time is observed for amplitude ratio measurements. A resolution of 85ppb corresponding to normalised stiffness perturbations...
Microelectromechanical system (MEMS) oscillators are conventionally designed so that the resonator is operated within the linear regime. This paper investigates an optimal low noise point for a nonlinear MEMS oscillator where phase noise to frequency noise conversion is minimized. A closed loop oscillator consisting of a digitally controlled phase shifter is implemented and measurements of frequency...
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