We demonstrate a vertical p-n junction silicon Mach-Zehnder modulator constructed with hydrogenated amorphous silicon strip-loaded waveguides on a flat SOI platform. A 3-mm-long phase shifter shows 0.80- to 1.86-Vcm modulation efficiency, 7.3- to 16.9-dBV loss-efficiency product, 3-dB bandwidth of 17 GHz, and 25-Gb/s operation.
The double taper-type mode convertor for direct bonded GaInAsP/SOI hybrid photonic devices was proposed and the characteristics of the fabricated structure using plasma activated bonding were measured. The calculated and measured results showed the coupling efficiencies of 90% and 75%, respectively.
The in-plane and interlayer waveguide-type couplers between crystalline Si and amorphous-Si:H wire waveguides, for 2D/3D hybrid-material integration are presented in this paper. The in-plane-type coupler achieves stable coupling between two waveguides by using tapers located at the tips of the waveguides. The interlayer-type coupler can connect two waveguides, despite an interlayer distance of 1 μm,...
A vertical trident coupler for 3D optical circuit was demonstrated. This is novel interlayer directional-type coupler between crystalline Si and amorphous-Si:H wire waveguides. The trident structure can manage both easiness of fabrication and high coupling even with relatively thick interlayer distances. In experiment, this trident coupler realized low coupling loss (coupling efficiency) of 0.58dB...
Inter-layer coupling between multilayer waveguides was demonstrated using hydrogenated amorphous silicon (a- Si:H) grating couplers with metal mirrors. The fabricated device which has the inter-layer distance of 2 цт successfully showed wider bandwidth compared with uniform grating structure.
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