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This paper deals with the optical modeling of thin hydrogenated microcrystalline silicon films grown on flexible low-cost iron-nickel alloy substrates by low-temperature (175°C) plasma-enhanced chemical vapor deposition. This material serves as the absorber in solar cells and hence it has direct impact on the resulting solar cell performance. Since the crystallinity and the material quality of hydrogenated...
Crystallinity and material quality of hydrogenated microcrystalline silicon (μc-Si:H) films change during their growth, leading to a complex material structure. In order to identify the composition of those inhomogeneous films, deposited on iron–nickel (Fe–Ni) alloy substrates, in-situ ellipsometric data were taken during the thin film growth at regular time intervals. The analysis of the in-situ...
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