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Crystallinity and material quality of hydrogenated microcrystalline silicon (μc-Si:H) films change during their growth, leading to a complex material structure. In order to identify the composition of those inhomogeneous films, deposited on iron–nickel (Fe–Ni) alloy substrates, in-situ ellipsometric data were taken during the thin film growth at regular time intervals. The analysis of the in-situ...
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