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This paper describes a new sensor system for an abdominal palpation procedure in traditional medicine. This sensor system uses a motion capture system and a thin film force/pressure sensor which enables to measuring the depth and the force/pressure at the same time during abdominal palpations. We customised the motion capture system, making it suitable for abdominal palpations, to prevent a physician...
This paper focuses on the attempt to formulate the prescription prediction logic based on the medical data analysis towards the future computer-assisted-diagnosis for Kampo medicine. We constructed and evaluated prediction models for some frequently-used prescriptions using six kinds of machine learning algorithms including artificial neural network, multinomial logit, random forest, support vector...
This paper describes a novel multipoint thin film polymer pressure/force sensor enabling detection of pressure/force pulse wave. The sensor features a high sensibility of 11mv/mmHg along with an extremely thin thickness of 100 µm and a high flexibility to adapt to the radial artery portion. The sensor uses charged cellular polymer as sensing layer, which contains 25 separated sensing dots to avoid...
A wireless motor condition precise analysis system that uses a highly efficient energy harvester is described in this paper. A continuation data sampling is required for the condition analysis of a motor. We developed the technology that makes a vibration energy harvester highly efficient and reduces the energy consumption of the whole system. A battery-less wireless analysis system was created in...
This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally...
This paper describes a fully integrated 8-bit digital tunable filter module operating in the S band region and featuring a low insertion loss of less than 3.2 dB and small size of 3.6 mm by 4.7 mm. The tunable filter is based on a novel filter circuit includes three LC resonators that are connected to a T-network with a capacitive coupling between in and out terminal to form transmission zeros at...
This paper presents a small packaged, reliable and low-voltage driven RF-MEMS switch for wireless communication. We developed novel fabrication process of an RF-MEMS switch using a PZT actuator without a backside cavity to realize wafer-level-packaging (WLP). We also developed organic-free WLP process using sub-micron Au particles simultaneously to contact electrically and to seal hermetically with...
This paper presents a novel filter circuit configuration that enables both the center frequency and the bandwidth to be tuned with a steep frequency response. Digital-type and microelectromechanical system (MEMS) analog-type tunable filters with a small size of 3.3 mm × 3.8 mm on a high-k low-temperature-co-fired-ceramics (LTCC) wiring wafer have been developed to verify the proposed filter configuration...
This paper presents the effect of frequency of radio frequency microelectromechanical system (RF MEMS) 3D integration with an actual device. A piezoelectric transducer (PZT)-actuated RF MEMS switch that uses a single crystal silicon asymmetric beam was designed, fabricated, and evaluated. We successfully drove a stiff beam (with spring constant > 2,000 N/m) despite a low voltage (<15 V). The...
There is a growing need for energy conservation through energy consumption in offices that have increased 40% from 1990 in Japan. Previously reported electric-power-consumption measurement systems are small for homes [1–3]. We have developed a practical system for a large-scale office. Simple and low power consumption smart power strip having a fail-free power measurement sensor was developed. System...
This paper describes the concept, fabrication process technologies and performance of a novel 3D heterogeneous integration method developed for RF applications. This method combines the advantages of LTCC, passive integration and MEMS technologies and is promising for the miniaturization and multifunction of future RF-modules. The basic concept is to form a large-size LTCC wiring wafer, and then to...
This paper describes an electric power visualization system that is developed to reduce electric power consumption in a large-scale office. A small, simple, and smart power strip is developed for practical use with a newly designed built-in contactless current sensor for each outlet. Electric power visualization server used for data acquisition from each outlet of the smart power strip and for the...
This paper describes a MEMS tunable bandpass filter operating in the S band region and featuring a low insertion loss of −2.3 dB and small size of 3.7 mm by 4.1 mm. The tunable filter is based on MEMS-varactors-loaded microstrip resonators and has been directly constructed on a high-k low-temperature-co-fired-ceramics (LTCC) wiring wafer whose dielectric constant is 50, using MEMS-on-LTCC technology...
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