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Through-Co self-forming-barrier (tCoSFB) metallization scheme is introduced, with Cu gap-fill capability down to 7 nm-node dimensions. Mn atoms from doped-seedlayer diffuse through CVD-Co wetting layer, to form TaMn O barrier, with integrity proven by vertical-trench triangular-voltage-sweep and barrier-oxidation tests. tCoSFB scheme enables 32% and 45% lower line and via resistance, respectively...
This paper presents a 4-channel wearable wireless neural recording system that consists of wireless head stage, receiver board, and user interface software. The wireless head stage is implemented using a custom designed font-end IC for bio potential amplification, filtering, and channel selection and a commercial analog FM transmitter chip. Adjustable gain and bandwidth of the channel allows the system...
The chip is composed of eight 16-channel front-end blocks, data serializing circuits, a DSP for on-chip spike sorting, digital MUX, encoder, UWB TX, and bias generators. The chip operates in one of the two modes. In sorting mode, a selected channel is connected to the on-the-fly spike sorting block and the extracted features of the spikes are transmitted for off-chip classification. In streaming mode,...
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