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In order to design a quartz accelerometer with high-precision vibration characteristics and strong resistance to external shock, a novel double-ended tuning fork quartz accelerometer that combines the well-known principles of the tuning fork techniques is developed. The mechanical structure of the double-ended tuning fork quartz accelerometer comprises of a pair of double-ended tuning forks, one damping...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
The performance of silicon micro-gyroscope (SMG) is influenced deeply by quadrature error and offset error. The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are enduced. In order to eliminate the effects of the quadrature error and offset error, as well as the inherent non- linearity in the capacitance-type sensors, a...
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