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This paper reports a 80nm air gap double-ended tuning fork (DETF) resonator partially filled with 20nm of HfO2. The device operates at 10.7 MHz with a quality Q-factor of 7930 and a motional resistance, Rm, x18 better than for the measured counterparts in air-gaps. An enhancement of the S21 transmission signal of 6dB in addition to the reduction of the Rm have been achieved thanks to the improvement...
This paper reports advances in the field of vibrating body transistors (VBTs) made on silicon-on-insulator substrates, compatible with CMOS. We review various vibrating transistor principles and present new results on scaled vibrating body FETs, resulting in resonant body Fin-FET architectures with two lateral air-gaps, showing resonance frequencies from 10MHz to 150MHz. These devices are expected...
Subsequently, growing interest in wireless applications has generated tremendous technological progress in the field of radio frequency micro-electro-mechanical systems (RF MEMS) and transformed the MEM resonator technology based on IC-compatible micromachining processes and materials such as semiconductors, polysilicon or metals in a strong competitor position to the quartz crystal. Today, majority...
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