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Atomic Fore Microscopes (AFMs) are widely used for nanoscale applications. Until recent developments these instruments were controlled in open loop or by a PID type controller. In the last decade model-based control techniques emerged for controlling AFMs, but in almost all cases the multivariable behavior was ignored. In this paper, we present a multivariable control strategy using the standard plant...
Atomic Force Microscopes (AFMs) are widely used for the investigation of samples at nanometer scale. In this paper, we present the modeling, the identification and the control of a metrological AFM. The metrological AFM is used for the calibration of transfer standards for commercial AFMs. Therefore, the focus of the presented work is on scanning accuracy rather than on scanning speed. The contribution...
In this paper, a blind identification method is employed to model multivariable disturbances with fixed direction. The multivariable disturbance model is used to design non- diagonal weighting filters for Hinfin control. It is demonstrated that in this way, intuitive shaping of the directions of closed loop transfer functions is facilitated, maximally exploiting design freedom that has no analogue...
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