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The possibility to conform microelectronic circuits onto non-planar or even high-curvature surfaces is of increasing interest for future applications. A promising flexible substrate concept based on vertical thinning/lateral partitioning and the substrate transfer technology is developed. Test structures for flexibility testing which consist of a partitioned ultra-thin poly-silicon layer sandwiched...
In this paper, results of experiments and FE simulations on mechanical issues of poly-and single crystalline silicon on ultra-thin polyimide substrates are presented. Formation and propagation of cracks within the silicon and dielectric layers are then studied under controlled bending and tensile tests using bending and tensile tools being custom designed for this purpose. The results show that the...
The acceptable flexibility for ultra-thin substrate would be reached by embedding the ultra-thin substrate into the flexible polyimide and patterning the poly-silicon or silicon into square segmentations. In this contribution, results of experiments and FE simulations on mechanical reliability issues of poly- and single crystalline silicon on ultra-thin polyimide substrates are presented. Generation...
In this contribution, results of our work on reliability issues of ultra-thin poly- and single crystalline silicon layers on thin polyimide substrates under mechanical deformations is presented. By embedding the ultra-thin silicon layers into a thin flexible polyimide substrate and patterning of silicon into square or hexagonal segmentations, an increased mechanical flexibility and resistance against...
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