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It is well known that 3D channel devices, such as double-gate (DG) and tri-gate (TG) FinFETs, provide excellent short-channel effect (SCE) immunity. Thus, the scaled 3D channel FinFET flash memories with oxide-nitride-oxide (ONO) charge trapping layers have actively been developed [1–3]. Very recently, we have also developed floating-gate (FG) type SOI-FinFET flash memories [4–7]. In this paper, we...
The tri-gate (TG)- and double-gate (DG)-type poly-Si fin-channel split-gate flash memories with a thin n+-poly-Si floating-gate (FG) have successfully been fabricated, and their electrical characteristics including the variations of threshold voltage (Vt) and S-slope have been comparatively investigated. It was experimentally found that better short-channel effect (SCE) immunity, smaller Vt variations,...
The functional tri-gate flash memories with splitgate have been demonstrated for the first time, and its Vt variabilities before and after one P/E cycle have be systimetically compared with stack-gate ones. It was confirmed that split-gate shows smaller Vt distribution after erase and excellent over-erase immunity compared to those of stack-gate. Moreover, it was found that BVDS is higher than 3.2...
PVD-TiN gate FinFET SRAM half-cells with different β-ratios and fin-height controlled transistors have successfully been fabricated using orientation-dependent wet etching and selective recess RIE. It was found that read static noise margin (SNM) increases significantly by controlling β from 1 to 2. With further increasing β, read SNM increases slightly. On the other hand, write margin shows weak...
In this paper we have shown the application of QWI to the fabrication of QCW laser bars. Extended reliability has been shown as well as the recent development of higher power bars and stacks.
We present the integration of super long horizontally aligned single-walled carbon nanotubes (SWNTs) on the micromachined wide trenches for infrared (IR) sensor application. The HA-SWNTs were found to be able to grow across trenches as wide as 1000 mum forming parallel SWNT bridges on the trench. The sensor fabricated with only one process shows sharp and remarkable responses to the ~ 4 mW IR radiations...
EAST plasma facing components (PFCs) have the function of protecting the vacuum vessel, heating systems and diagnostic components from the plasma particles and heat loads, and also additional to this particles and heat loads handling. They are installed in the vacuum vessel together with in-vessel coils, cryopump and diagnostic components. The design, fabrication and assembly have been finished. The...
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