The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Zinc tin oxide (ZTO) thin films are of interest for many applications, including transparent conducting oxides and buffer layers in thin film solar cells. In this work, the ability of atomic layer deposition (ALD) to control both thickness and composition of the ternary material is explored and the resulting film properties are characterized. ZTO was deposited at 150°C by alternating growth of tin...