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In this paper, we present a shear mode film bulk acoustic biosensor based on micro-electromechanical technology. The film bulk acoustic biosensor is a diaphragmatic structure consisting of a lateral field excited ZnO piezoelectric film piezoelectric stack built on an Si3N4 membrane. The device works at near 1.6 GHz with Q factors of 579 in water and 428 in glycerol. A frequency shift of 5.4 MHz and...
The AlN-based solidly mounted resonator operated in thickness shear mode using lateral field excitation is presented both in theory and experiment. The resonator configuration consists of the electrodes parallel to the surface, a highly c-oriented AlN film and an acoustic Bragg reflector. The theoretical analysis of the Christoffel equation predicts that the electric field in any direction normal...
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