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An AlGaInP multi-quantum-well (MQW) light-emitting diode (LED) with a direct Ohmic contact structure, formed by an indium-tin-oxide (ITO) transparent film and AuBe diffused thin layer, is fabricated and studied. By the deposition of an AuBe metallic thin layer on the surface of Mg-doped GaP window layer, followed by a thermal activation process, a direct Ohmic contact between ITO and p-GaP layers...
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