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In this study, a novel planar inductor to detect the pressure sensor is proposed. The planar inductor consists of planar coil and CoFeB films. The proposed sensor exploits the inverse-magnetostriction effect to change the permeability of the CoFeB film by pressure load. This permeability variation will further result in the inductance difference of the planar inductor. Consequently the relationship...
The stacking of metal/tungsten layers as the in-plane magnetic-coil for CMOS-MEMS magnetic sensor has been proposed and demonstrated for the first time. Magnetic fields introduce forces through in-plane coils to drive suspended spring-mass structure. Capacitance sensing electrodes could detect the dynamic response of spring-mass structure to determine magnetic fields. Such design has the following...
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