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For sp2 or sp3 carbon material growth, it is important to investigate the precursors or intermediates just before growth. In this study, the density of ethylene (C2H4) outside the plasma discharge space and just before reaching the carbon nanotube (CNT) growth region is investigated by vacuum ultraviolet absorption spectroscopy for plasma discharge in an antenna‐type remote plasma chemical vapor deposition...
This chapter discusses synthesis and characterization of carbon nanotubes (CNTs). It first discusses arc‐discharge and laser ablation methods which were intensively used in the early period, and then describes chemical vapor deposition (CVD), a method widely used today. In the point of view of assembly and selectivity of CNTs, the important criteria for device application, synthesis of vertically...
For nanotube synthesis, iron platinum (FePt) alloy particles have been prepared on a single crystalline magnesium oxide (MgO) substrate by alternate sputter deposition of FePt and MgO. Partially facetted {111}-nano particles of FePt have been epitaxially formed on the substrate and periodically exposed on the surface. The particles of FePt were half-buried between deposited MgO showed superior thermal...
We have clarified the reason that aluminum (Al) buffer layers prepared by sputtering on catalytic substrates are stable for single-walled carbon nanotube forest synthesis on chemical vapor deposition. We have focused on the difference between thermal evaporation and sputtering as the method for the preparation of the buffer layers and have analyzed the Al layers using X-ray photoelectron spectroscopy...
The effect of titanium (Ti) added to the top layer of an aluminum (Al)/iron (Fe)/Al (bottom) sandwich catalytic substrate was studied. The Ti caused a significant lengthening in the single-wall carbon nanotube forest produced by chemical vapor deposition (CVD). In general, particles of iron oxide on the Al/Fe/Al catalytic substrate are formed by exposure to the atmosphere during deposition process...
Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality...
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