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A scanning electron microscope (SEM) is a sophisticated equipment employed for fine imaging of a variety of surfaces. In this study, prediction models of SEM were constructed by using a generalized regression neural network (GRNN) and genetic algorithm (GA). The SEM components examined include condenser lens 1 and 2 and objective lens (coarse and fine) referred to as CL1, CL2, OL-Coarse, and OL-Fine...
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