The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A challenge to the use of extreme ultraviolet lithography (EUVL) is contamination of the mask during its processing and storage since current techniques for contamination prevention, such as pellicles, cannot be used with the mask materials under EUVL conditions. This paper characterizes the adhesion forces between model contaminant particles and photomask and thin film surfaces relevant to extreme...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.