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The recent developments in micro-mechanical or micro-electro-mechanical (MEMS) systems have enabled the use of new transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result, an innovative family of chemical and biological sensors has emerged. In this work we discuss the recent advances in cantilever transducers. While MEMS represents a diverse family...
Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors...
We describe the design, fabrication and characterization of simple micromechanical structures that are capable of sensing static electric time varying electromagnetic fields. Time varying electric field sensing is usually achieved using an electromagnetic antenna and a receiver. However, these antenna-based approaches do not exhibit high sensitivity over a broad frequency (or wavelength) range. An...
Over the past three decades there have been spectacular developments in micro-electro-mechanical (MEMS) systems. As a result, an innovative family of chemical and biological sensors has emerged. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. In this work we discuss chemical...
The use of microfabricated cantilevers as immunosensors for the detection of human interleukin-1 beta (HIL1-β), one of the proinflammatory cytokines, is demonstrated. Cytokines are important biomarkers to monitor the effect of drugs influencing the immune system or inflammation. Nanostructured microcantilevers (MCs) functionalized with anti-human interleukin-1 beta (anti HIL1-β) antibody (Ab) are...
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