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We report on the design, simulation and fabrication of polymer-composite micro-Golay cells for THz and far-infrared detection. Preliminary experimental results showed that the cell's mechanical, thermal and optical properties make it an excellent candidate for pneumatic THz detectors. The theoretical performance of the cell was modelled and simulated in COMSOL, and its expected performance was found...
Gold membranes with large arrays of sub-μm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was achieved by 1) up-scaling of the deposition of close-packed bead monolayers to 4″ wafer substrates, 2) controlled bead size reduction, 3) etching...
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