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This paper presents for the first time a full 32 nm CMOS technology for high data rate and low operating power applications using a conventional high-k with single metal gate stack. High speed digital transistors are demonstrated 22% delay reduction for ring oscillator (RO) at same power versus previous SiON technology. Significant matching factor (AVT) improvement (AVT~2.8 mV.um) and low 1/f noise...
CMOS devices with high-k/metal gate stacks have been fabricated using a gate-first process flow and conventional stressors at gate lengths of 25 nm, highlighting the scalability of this approach for high performance SOI CMOS technology. AC drive currents of 1630muA/mum and 1190muA/mum have been demonstrated in 45 nm ground-rules at 1V and 200nA/mum off current for nFETs and pFETs, at a Tinv of 14...
In this work, two different methodologies are used to quantitatively evaluate devices with metal high-k gate dielectrics for their scaling benefits over conventional polysilicon gate devices. For each method, device characteristics and ring oscillator delay calculations are performed. Our results show that aggressive channel length scaling continually provides transistor performance gain with the...
This paper shows ultra-low contact resistivities with standard NiPt silicide process that can reach below 10-8 Omega-cm2 for both n+ and p+ Si and demonstrates that NiPt silicide can fulfill CMOS technology requirements down to the ITRS 22 nm node.
Starting with the 45 nm node, a tradeoff between performance and density exists that become more severe at the 32 nm node. An in-depth analysis of the impact of pitch and increased parasitics on device performance in the 32 nm node is presented. To counteract these effects, reduction of parasitics, gate length scaling, and aggressive stress engineering are necessary. Optimized layout using a "relaxed-pitch"...
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