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This article reports a comprehensive study on damage evolution in undoped InP due to 100 MeV silver (Ag 7+ ) ion irradiation. Raman and Rutherford back scattering channeling (c-RBS) measurements are employed to bring out two different aspects of disorder in the system. While Raman spectroscopy revealed a monotonic increase in sub-surface strain due to ion irradiation, the later detected heavy...
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