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This paper presents using ultrasonic spray pyrolysis deposition method to grow MgO nanorod arrays on the top surface and the sidewall of the GaN-based ultraviolet light-emitting diodes. It is found that when the thickness of the MgO film is over 60 nm, the self-assembled MgO nanorod arrays are obtained. Transmission electron microscopy, scanning electron microscopy, X-ray diffraction, X-ray photoelectron...
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