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In this paper we propose a new type of solid-state gas sensor by combining three recent advances, namely silicon-on-insulator CMOS technology, through wafer etching and growth of gas-sensitive carbon nanotubes. We have developed novel tungsten-based CMOS micro-hotplates that offer ultra low power consumption (less than 10 mW at 250degC), on-chip CNT deposition at temperatures up to 700degC, and full...
Optimized nickel silicide technology is proposed for high performance fully depleted nano-scale SOI CMOSFETs. Nickel silicide properties with different initial nickel thicknesses were investigated on thin film SOI MOSFETs. Silicon consumption rate and correlation between the deposited nickel and the formed nickel silicide thickness were calculated. It was shown that more thermally stable nickel silicide...
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