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An AlN-based based film bulk acoustic resonator has been fabricated using a magnetron sputtering method, which was employed as a biosensor for detection of a carcinoembryonic antigen. The resonator consisted of an AlN piezoelectric layer and a Mo/Ti Bragg reflector which had a working resonance near 2.0GHz. The carcinoembryonic antigen binding aptamers were self-assembled on the top gold electrode...
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