The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Scheduling optimization in semiconductor manufacturing is always a crucial task in production performance indicators such as machine utilization, cycle time and delivery times. With the increasing complexity of fabrication techniques and scales, scheduling and control activities are inevitably confronted with each other and shall be integrated correspondingly. In particular scheduling and control...
In semiconductor high-mix fabs, several technology nodes are run on the same line, using tool types from different generations. In this context, processability is a function defining which products can be processed on a given machine considering the current status of both the product and the machine. So in a high-mix context, having an information system that provides reliable information on processability...
In a worldwide environment, sustaining high yield with a minimum number of quality controls is key for manufacturing plants to remain competitive. In high-mix semiconductor plants, where more than 200 products are concurrently run, the complexity of designing efficient control plans comes from the larger amount of data and number of production parameters to handle. Several sampling algorithms were...
In this paper, we are interested in the integration of scheduling and Advanced Process Control (APC) in semiconductor manufacturing. We consider the problem of scheduling jobs of different families on non-identical parallel machines. A special time constraint, associated to each job family, must be satisfied for a machine to remain qualified to process the job family. In addition, we introduce the...
This paper studies the scheduling of lots (jobs) of different product types (job families) on parallel machines, where not all machines are able (i.e. are qualified) to process all job families (non-identical machines). This is known in the literature as scheduling with machine eligibility restrictions. A special time constraint, associated with each job family, should be satisfied for a machine to...
In order to optimize the number of controls in semiconductor manufacturing, a Permanent Index per Context (IPC) has been developed to evaluate in real-time the risk on production tools. Depending on the context which can be defined at tool level, chamber level or recipe level, the IPC allows a very large amount of data to be managed and helps to compute global risk indicators on production. A prototype...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.