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As the high-tech production system gets more complex, Equipment Condition Diagnosis (ECD) in semiconductor manufacturing for Fault Detection and Classification (FDC) is becoming more and more challenging than ever. This paper uses well-known machine learning techniques such as Support Vector Machine (SVM), K-Means clustering and Self-Organizing Map (SOM) to develop an efficient ECD model. The process...
In this paper, production of lots under time constraints in a semiconductor wafer fabrication is investigated. A time constraint covers a sequence of process steps and has a maximum time that lots must spend in these steps. Lots which violate a recommended time constraint have to be scrapped or reprocessed. Accordingly, controlling the entrance of lots in a time constraint is critical in semiconductor...
Scheduling optimization in semiconductor manufacturing is always a crucial task in production performance indicators such as machine utilization, cycle time and delivery times. With the increasing complexity of fabrication techniques and scales, scheduling and control activities are inevitably confronted with each other and shall be integrated correspondingly. In particular scheduling and control...
In semiconductor high-mix fabs, several technology nodes are run on the same line, using tool types from different generations. In this context, processability is a function defining which products can be processed on a given machine considering the current status of both the product and the machine. So in a high-mix context, having an information system that provides reliable information on processability...
In a worldwide environment, sustaining high yield with a minimum number of quality controls is key for manufacturing plants to remain competitive. In high-mix semiconductor plants, where more than 200 products are concurrently run, the complexity of designing efficient control plans comes from the larger amount of data and number of production parameters to handle. Several sampling algorithms were...
In this paper, we are interested in the integration of scheduling and Advanced Process Control (APC) in semiconductor manufacturing. We consider the problem of scheduling jobs of different families on non-identical parallel machines. A special time constraint, associated to each job family, must be satisfied for a machine to remain qualified to process the job family. In addition, we introduce the...
This paper studies the scheduling of lots (jobs) of different product types (job families) on parallel machines, where not all machines are able (i.e. are qualified) to process all job families (non-identical machines). This is known in the literature as scheduling with machine eligibility restrictions. A special time constraint, associated with each job family, should be satisfied for a machine to...
In order to minimize yield losses due to excursions, when a process or a tool shifts out of specifications, an algorithm is proposed to reduce the scope of analysis and provide in real time the number of lots potentially impacted. The algorithm is based on a Permanent Index per Context (IPC). The IPC allows a very large amount of data to be managed and helps to compute global risk indicators on production...
In order to optimize the number of controls in semiconductor manufacturing, a Permanent Index per Context (IPC) has been developed to evaluate in real-time the risk on production tools. Depending on the context which can be defined at tool level, chamber level or recipe level, the IPC allows a very large amount of data to be managed and helps to compute global risk indicators on production. A prototype...
Photolithography is one of the most complex processes in semiconductor manufacturing. Lot scheduling within photolithography is a challenging activity where substantial improvement can be made. With the aim of determining effective dispatching strategies, Crolles 2 Alliance developed a dispatcher simulator tool which allows the study of dispatching strategies by simulation for the most common bottleneck...
This paper deals with simulation of scheduling policies in semiconductors manufacturing. We propose a consistent approach that deals with global management and local scheduling. After introducing the problem, traditional resolution methods and their limitations are presented. The proposed approach is described and the first results are presented. The paper concludes with further research directions.
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