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This paper reports the fabrication technique of electron micro-optics using silicon deep reactive ion etching. Stacked 120-mum-thick three silicon wafers stacked with cavities using patterned glass substrates are etched by ldquoa direct cavity through etching techniquerdquo. An array of the electron micro-optics consisted of three electrodes can be fabricated by one-mask process without alignment...
Piezoresistive nanocantilevers are proposed for high-sensitive sensing applications such as thermal detectors, mass sensors, and magnetic resonance force microscopy. This paper describes the development of 100-nm-thick piezoresistive nanocantilevers and characterization of the temperature dependence of the piezoresisitivity and conductivity. The pieozresistive nanocantilevers are fabricated using...
A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 mum. The external force at shear- vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency...
Microelectromechanical systems (MEMS)-based near-field scanning optical microscopy (NSOM) probes with a bow-tie antenna structure consisting of two metal triangular electrodes separated by a narrow gap have been designed and fabricated. An electrostatic actuator is integrated on this bow-tie probe to decrease the gap width for enhancing the optical near-field intensity. A self-alignment process based...
An advanced scalable Cu damascene process was developed using self-assembled porous silica with tetramethylcyclo-tetrasiloxane (TMCTS) treatment and selective electroless plating of Cu barrier. It is found that the TMCTS vapor treatment could recover process-induced damages after plasma ashing and chemical mechanical polishing, resulting in no line-width dependence of the effective dielectric constant...
A thin triangular cantilever sensor of AT-cut quartz crystal with a capability of self-sensing of vibration has been developed for force and nanometric sensing. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 16 ~ 20 mum. Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the...
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