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High frequency bending mode membranes are fabricated using a 1 mum PZT thick film deposited by sol-gel. Finite element analysis (FEA) is used to tailor the membrane radius to a resonant frequency in the 5-10 MHz frequency range. Using a radius of 16 and 24 mum, devices are produced as individual cells as well as 3 times 3 and 5 times 5 arrays. The arrays are designed so that the bottom electrode is...
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