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Abstract. The structural characterization of heat-treated CN films fabricated by dual-facing-target sputtering for soft X-ray multilayer mirrors was performed by means of X-ray diffraction (XRD), Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS). The XRD analyses indicate a graphization process in the CN films during thermal annealing. The Raman analyses imply that the primary bonding...
The structural stability of CoN/CN soft X-ray multilayers has been investigated by using complementary measurement techniques. Annealing in the low-temperature range of 473523K, we find three interdiffusion features, different from Co/C multilayers [H.L.Bai et al.: Thin Solid Films 286, 176 (1996)]. (1) The interdiffusion critical wavelengths were calculated as 2.002.04nm at temperatures ranging from...
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