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Lithium silicon phosphorus oxynitride (LiSiPON) thin films with different compositions have been prepared by RF magnetron sputtering in N2 by using three targets xLi2SiO3 · (1 − x) Li3PO4 with x = 0.1, 0.3, and 0.5. Compared with LiPON, the electrical properties of LiSiPON have been improved by introducing silicon. LiSiPON films deposited from the target 0.5Li2SiO3 · 0.5Li3PO4 yield the highest ionic...
Transparent amorphous lithium phosphorus oxynitride (LiPON) thin films with different thickness have been prepared by RF magnetron sputtering at a growth rate of 14nm/min. The mean ionic conductivity of as-deposited LiPON films determined by impedance spectroscopy was 4.9 μS/cm at 22°C with the activation energy of 0.55eV. The electronic partial conductivity was measured to be 1.6×10−6 μS/cm by recording...
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