Deposition of CdxZn1−xOyS1−y was demonstrated with atomic layer deposition (ALD) using diethylzinc (DEZn), dimethylcadmium (DMCd), H2O, and H2S as the precursors. The chemical, material, and optical properties of the films were investigated, and these properties were adjusted by varying the stoichiometry. Notably, by correlating the crystal phases to the optical constants and bandgap, strong relationships...
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