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Silicon-based fuel cells are under active development to supply chip-scale electrical power supply. In this paper, we demonstrate the use of sulfuric acid loaded nanoporous silicon as a proton electrolytic membrane (PEM) material for micro-fuel cell applications. Sulfuric acid loaded nanoporous silicon membranes with thickness of 40-70μm have proton conductivities (0.0068-0.33S/cm) comparable to,...
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