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A monolithic gas sensor array fabricated in industrial CMOS technology combined with post-CMOS micromachining is presented. The device comprises an array of three metal-oxide-coated micro-hotplates with integrated MOS transistor heaters and the needed driving and signal-conditioning circuitry. Three digital PID controllers enable individual temperature regulation for each hotplate. The operating temperature...
Signal degradation and an array size dictated by the number of available interconnects are the two main limitations inherent to standalone microelectrode arrays (MEAs). A new biochip consisting of an array of microelectrodes with fully-integrated analog and digital circuitry realized in an industrial CMOS process addresses these issues. The device is capable of on-chip signal filtering for improved...
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