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We report the use of microelectronic laminate-based manufacturing to produce integrated devices capable of performing both electronic and biological analysis, particularly for protein assays. There is currently a significant push to develop miniaturized biofluidic devices for portable, point-of-care medical applications. Such “lab-on-a-chip” devices are typically built using lithographic and stamping...
This paper reports on an electromagnetically actuated MEMS cantilever device that is triggered using an oscillating signal which sends the device into resonance. At resonance, a moving magnetic cantilever is driven to large amplitudes, allowing it to be driven far enough to latch against a magnetic pad. Since the device is driven at resonance, it can be combined with other devices that have different...
This paper describes the use of optical laminate optics that utilizes both passive 2-D optical elements and active components. This is demonstrated in a proof-of-concept 1×2 optical switch concept that is compatible with micro electrical mechanical systems (MEMS) fabricated in laminates. The device uses a waveguide structure that is precision cut to form a cantilever structure. The cantilever, which...
We report on a microelectromechanical magnetic dc switch that operates at low control voltage (3 V), magnetically latches at on/off stage, and switches large voltages and currents, both dc and ac, in under 3 ms. The device, which measures 3 mm 3 mm fully packaged, has been measured to handle 0.97 A at 10.6 Vdc (10.2 W) and 15 W at 110 Vac. This represents a remarkable power-handling capability...
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