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In this paper, anodic aluminum oxide (AAO) is introduced as a potential new material for making interposers, and a low cost process for building high density interposers is demonstrated. Hard anodic process was used to create thick anodic aluminum oxide (AAO) films containing high density vertical nanopores on aluminum substrates. Silicon dioxide (SiO2) deposition by plasma enhanced chemical vapor...
We have explored the use of a highly anisotropic thick film, anodic aluminum oxide (AAO), for use in producing high aspect ratio structures that can be used in MEMS and packaging applications. We have found that under certain conditions, this material can be etched with extremely high anisotropic etch ratios, resulting in highly vertical structures. If prepared properly, the AAO film contains a high...
The development and integration of flexible biocompatible electronics is of considerable interest in the biomedical community. Electronic and fluidic based monitoring and therapeutic platforms can be contoured into comfortable, low profile devices suitable for implanting in the body or for wearing on the body or in clothing. Truly integrated bioflexible devices would incorporate electronics, optics,...
We have developed a novel process that uses Ethylene-Vinyl Acetate (EVA) films to realize low cost integrated microfluidic systems in small packages. The EVA acts as both a final package for the device as well as a functional material for hosting molded microfluidic channels and optical structures such as waveguides. In this paper we describe the lamination based packaging of microfluidics, characterize...
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