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The production of functional particle systems is becoming increasingly important in many industries. In the early development of such products, there is often not a sufficient amount of educts available or the educts are expensive and/or toxic. For this purpose, lab-scale processes are used which often differ from the later production processes. Unfortunately, the processes have a direct impact on...
Multilayer LTCC substrate can fulfill circuit miniaturization; meanwhile, its “brick-laying” fabrication manner provides feasibility for complicated 3D structures. Based on the traditional fabrication technology, this paper introduces the novel fabrication methods for two kinds of typical 3D structures on LTCC. For microfluidic structure, we choose applicable graphite-based sacrificial material. By...
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