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We present a fully reconfigurable optical filter built by cascading four identical unit cells. The devices are fabricated using two distinct methods: a complementary metal-oxide-semiconductor (CMOS) compatible process utilizes deep ultraviolet (DUV) lithography with tuning elements defined by ion implantation to make lateral p-i-n diodes for current injection regions, while an electron beam (E-beam)...
We present a fully-reconfigurable CMOS-compatible silicon-photonic lattice-filter with four cascaded unit cells consisting of resonant rings and Mach-Zehnder interferometers. The measurements show high-quality filter responses including IIR and FIR filter characteristics matching theoretical predictions.
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