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Turbomolecular pumps are high‐vacuum pumps which are used both for attaining very low ultimate pressures down to 10−10 mbar and for handling of high process gas flows up to inlet pressures of 10−3 mbar. Pumping speed and compression of these pumps essentially depend on the diameter of the inlet flange, on the design and rotational speed of the rotor and the Holweck stage respectively, and on gas type...