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A special raster scanning (SRS) method for reduction of charging effects is developed for the field of SEM. Both a conventional fast scan (horizontal direction) and an unusual scan (vertical direction) are adopted for acquiring raw data consisting of many sub‐images. These data are converted to a proper SEM image using digital image processing techniques. About sharpness of the image and reduction...
Quality of a scanning electron microscopy (SEM) image is strongly influenced by noise. This is a fundamental drawback of the SEM instrument. Complex hysteresis smoothing (CHS) has been previously developed for noise removal of SEM images. This noise removal is performed by monitoring and processing properly the amplitude of the SEM signal. As it stands now, CHS may not be so utilized, though it has...
Quality of an SEM image is strongly influenced by the extent of noise. As a well‐known method in the field of SEM, the covariance is applied to measure the signal‐to‐noise ratio (SNR). This method has potential ability for highly accurate measurement of the SNR, which is hardly known until now. If the precautions discussed in this article are adopted, that method can demonstrate its real ability....
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