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The boron concentration in the growth direction of hot filament chemical vapor deposited boron doped diamond film is studied. Raman spectroscopy showed that the asymmetry of 1332cm−1 peak was enhanced in the growth direction. The estimated boron content from the position of the Lorentzian contribution to the 500cm−1 Raman feature and the electron probe microanalysis on the cross-section of the diamond...
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