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Rate coefficients for elementary reactions connected to the potential energy wells of SiHCl3, SiH2Cl2, SiHCl2, and SiH3Cl, which are important Si1 species in chemical vapor deposition (CVD) processes that use chlorosilanes as silicon source gases, were determined through Rice–Ramsperger–Kassel–Marcus (RRKM) theory for various conditions of temperature and pressure. Many of the unimolecular decomposition...