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We report statistic characteristics of a newly found variability component: “current-onset voltage”. It is found that the “current-onset voltage” is hardly correlated with any other parameters such as threshold voltage VTH, transconductance Gm and DIBL. These results indicate that the “current-onset voltage” variability is quite a new type of variation that has never been considered before.
Using 1M DMA-TEG, the analyses of 5sigma Vth fluctuation in 65 nm-MOSFETs were carried out. Physical and electrical analyses confirmed that random dopant fluctuation is dominant though NMOSFET has larger fluctuation as compared with PMOSFET. To explain this phenomenon, a B clustering model is proposed. In the case of clustering with 5 to 6 B atoms in the channel, Vth fluctuation of NMOSFET can be...
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